Mark your selections and choose between table on screen and file format. Marking tips
For variables marked 
you need to select at least one value
SECTOR OF PERFORMANCE
TYPE OF R&D
YEAR
Number of selected data cells are:(maximum number allowed is 1,000,000)
Presentation on screen is limited to 1,000 rows and 150 columns
Number of selected cells exceeds the maximum allowed 1,000,000